| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method and a manufacturing apparatus for a resin composition solution which can effectively remove particulates contained in the resin composition solution, which could become a defect factor, and can suppress the generation of defects. SOLUTION: The resin composition solution which is housed in a tank 10 for housing the resin composition solution is discharged from the tank 10 and circulate-filtered by a circulation path having a liquid feeding means and a filtering means by this manufacturing method for resin composition solution. As the liquid feeding means, a diaphragm pump 13 is used, and in addition, the circulation-filtering is performed by the circulation path having a first damper 30 on a pump discharging line 28p on the downstream side of the diaphragm pump 13 in the manufacturing method. More preferably, a second damper 13c is installed in the diaphragm pump 13. COPYRIGHT: (C)2010,JPO&INPIT |
