发明名称 |
SUCK BAG HEIGHT TEST METHOD, SUCK BAG HEIGHT TEST DEVICE AND COMPUTER READABLE RECORDING MEDIUM |
摘要 |
<p>A suck bag height test method comprises the steps of picking up an image of a nozzle to be tested for the acquisition of a nozzle image and calculating a unit pixel length by using a nozzle inner diameter stored in advance and the number of pixels corresponding to the nozzle inner diameter on the nozzle image. Based on data set on the nozzle image of a process liquid region, a nozzle internal path region and a nozzle external region, the number of pixels corresponding to the suck bag height is acquired. By using the calculated length of the unit pixel and the number of pixels corresponding to the suck bag height, the suck bag height is calculated.</p> |
申请公布号 |
WO2010055552(A1) |
申请公布日期 |
2010.05.20 |
申请号 |
WO2008JP70480 |
申请日期 |
2008.11.11 |
申请人 |
TOKYO ELECTRON LIMITED;LEE, YOUNG CHAN;JEONG, YOUNG SUK;LEE, HYUNG JIN |
发明人 |
LEE, YOUNG CHAN;JEONG, YOUNG SUK;LEE, HYUNG JIN |
分类号 |
H01L21/027;B05C11/00;G01B11/02 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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