| 摘要 |
PURPOSE: A laser repair apparatus is provided to efficiently process a repair target using a digital mirror device(DMD), which corresponds to multiple wavelength laser, in order to transmit the laser. CONSTITUTION: A laser oscillator(31) radiates laser with a plurality of wavelengths. A plurality of DMD units(37a, 37b) is covered with an optical transmission plate which corresponds to the wavelength of the laser. A slider control unit(16) includes a slide holder(36) on which a plurality of DMD units are loaded and transfers the slide holder. The arrangement of the DMD units on a laser path is selectively changed by the slider control unit.
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