发明名称 DEVICE AND METHOD FOR CUTTING INGOT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a device and method for cutting an ingot, which can improve a cooling effect of a cutting part and a cleaning effect of a blade abrasive grain part by: efficiently supplying a coolant to the blade abrasive grain part; and sufficiently supplying the coolant even in cutting, in particular, a large-diameter ingot. <P>SOLUTION: The device for cutting an ingot includes at least one coolant pocket with a coolant to be supplied to a blade stored therein, and is structured such that the coolant is supplied to the blade by running the blade abrasive grain part of the blade through a groove part formed in an upper part of the coolant pocket in circulating drive to bring the coolant stored in the coolant pocket into contact with the blade abrasive grain part. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010114286(A) 申请公布日期 2010.05.20
申请号 JP20080286138 申请日期 2008.11.07
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 NISHINO HIDEHIKO;HIRANO YOSHIHIRO;TSUNODA SHIGEHARU
分类号 H01L21/304;B23D59/04;B28D5/04 主分类号 H01L21/304
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