| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical measuring device capable of calculating easily a film thickness or an optical constant of each layer over a measuring object domain of a sample. <P>SOLUTION: A first measuring means measures a polarization state of light after moving a measuring position to one stored first reference position. An auxiliary measuring means measures the polarization state of light after moving the measuring position to an auxiliary reference position based on a moving quantity to one stored first reference position. A first calculation means calculates the film thickness or the optical constant by performing fitting based on a first model corresponding to the first reference position stored in a storage part 15 and on the polarization state of light measured by the first measuring means. Similarly, an auxiliary calculation means calculates the film thickness or the optical constant by performing fitting based on an auxiliary model corresponding to the auxiliary reference position stored in the storage part 15 and on the polarization state of light measured by the auxiliary measuring means. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
