| 摘要 |
PROBLEM TO BE SOLVED: To finish an optical component, especially to manufacture a micro lens economically. SOLUTION: The finishing device includes: a coating means for coating a surface with an abrasive liquid, slurry 14; and a means for turning the substrate surface profile into a prescribed surface profile and/or a smooth surface by jetting a gas or liquid fluid jet 31 against the slurry and forming a high shearing zone on the surface of the substrate 20. The surface 20 can be coated by cascading a flowing slurry layer on the surface, or jetting the slurry against the shearing zone, or immersing the substrate 20 in the slurry. A nozzle 26 for distributing the jet fluid is correctly disposed at a prescribed distance from the surface to be finished or in a certain angle. Positioning the tip of the nozzle 26 in a first distance from the surface of the substrate 20 provides a rough removal function while positioning the tip of the nozzle 26 nearer the surface of the substrate 20 provides a refined removal function. COPYRIGHT: (C)2010,JPO&INPIT |
