| 摘要 |
A semiconductor device includes a substrate, a first channel layer pattern, a second channel layer pattern, a first transistor and a second transistor. The substrate has a first region and a second region. The first channel layer pattern is formed in the first region of the substrate and has a first volume. The second channel layer pattern is formed in the second region of the substrate and has a second volume that is different from the first volume. The first transistor includes a first gate insulation layer pattern on the first channel layer pattern, a first gate electrode on the first gate insulation layer pattern, and a first source/drain region in contact with the first channel layer pattern. The second transistor includes a second gate insulation layer pattern on the second channel layer pattern, a second gate electrode on the second gate insulation layer pattern, and a second source/drain region in contact with the second channel layer pattern.
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