| 摘要 |
A method of washing an object to be processed, using water containing at least either one selected from a hydrogen radical and a carbon radical, and a novel method capable of exerting sufficient washing effect without using chemicals, by a washing apparatus having a processing bath for washing an object to be processed, and a means for supplying the processing bath with water containing at least either one selected from a hydrogen radical and a carbon radical, and an apparatus for the novel method are provided.
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