| 摘要 |
PROBLEM TO BE SOLVED: To provide a new type film deposition apparatus which is used for a method of manufacturing a film by a casting method, and is able to effectively form sheets with a high smoothness and high dimensional accuracy. SOLUTION: The apparatus is provided with a film deposition stage 2 arranged on a base substrate 1 and a scraper 3 at a position making a right angle to the longitudinal direction of the film deposition stage. The film deposition stage is constructed by a plate and a flame being separable from each other, has a structure fixed on the base substrate with disconnectable fittings together with a keep plate set on the flame of the film deposition stage, is easy to separate and assemble, and is exchanged corresponding to the characteristics, shape, and dimension of the films to be formed. Also, a disconnectable film deposition flat plate 6 is installed on a film deposition space 4. COPYRIGHT: (C)2010,JPO&INPIT |
