METHOD FOR PRODUCING GERMANIUM TETRAFLUORIDE

摘要

A method for producing germanium tetrafluoride, which comprises a step of supplying a fluorine gas into a reactor which is filled with germanium metal and a diluent gas; a step of collecting germanium tetrafluoride, which is a reaction product, by passing the gas discharged from the reactor through a cooling collection unit, and a step of circulating the gas passed through the cooling collection unit back to the reactor.  By circulating the gas in the closed system as described above, germanium tetrafluoride can be produced safely and efficiently.