PROXIMITY EXPOSURE APPARATUS, METHOD OF LOADING AND UNLOADING SUBSTRATE IN PROXIMITY EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DISPLAY PANEL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To easily control the height of a push-up pin even when the size of a chuck is increased accompanying an increase in the scale of a substrate.

SOLUTION: A chuck 10 includes a plurality of push-up pin units each having a push-up pin 12, a motor 11 vertically moving the push-up pin 12, and a height adjusting mechanism adjusting the mounting height with respect to the chuck 10, and with at least one aperture to insert the push-up pin unit. At least one of the plurality of push-up pin units is inserted from above the chuck 10 into the aperture and mounted on the chuck 10 after adjusting the mounting height by the height adjusting mechanism. The motor 11 of each push-up pin unit is controlled to vertically move the push-up pin 12 so as to receive a substrate from a substrate conveying device or to deliver a substrate to the substrate conveying device.

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