MEMBER SUPPORTING APPARATUS, METHOD OF SUPPORTING MEMBER, COMPONENT MOUNTING APPARATUS, AND METHOD OF MOUNTING COMPONENT

摘要

<P>PROBLEM TO BE SOLVED: To provide a member supporting apparatus for supporting members stably and safely when performing mount work, or the like of components to members, such as substrates. Ž<P>SOLUTION: A substrate supporting apparatus 10 for supporting substrates by a plurality of support pins 13 includes: the plurality of support pins 13 provided at positions opposite to supporting surfaces of the substrates; a shaft holding body 6 for holding a plurality of elevation/lowering shafts 14; a drive section 7 for bringing the respective tip sections of the plurality of support pins 13 into contact with the substrates by moving the shaft holding body 6 in a support direction; a control section 20 for allowing timing when respective tip sections of not less than two support pins 13 come into contact with the substrates to differ by moving the shaft holding body 6 in a support direction while positions in the support direction of the respective tip sections of not less than two support pins 13 of the plurality of support pins 13 differ; and a plurality of fixation sections for fixing the positions of the plurality of support pins 13 while the respective tip sections of the plurality of support pins 13 are in contact with the substrates. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž