| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a flattened object that can obtain the flattened object with higher flatness, and to provide the flattened object and a method of flattening a treated surface. SOLUTION: The method of manufacturing the flattened object having at least a base material 1 has a near-field etching process for etching the treated surface using near-field light 4a, 4b, 4c. The flattened object is manufactured by this method of manufacturing the flattened object. The method of flattening the treated surface reduces maximum protrusion 5a, 5b, 5c length (Rmax) of the treated surface 2 to 10 nm or less by etching the treated surface using the near-field light. COPYRIGHT: (C)2010,JPO&INPIT |
