METHOD FOR FABRICATING CARBON NANOTUBE, WAFER FOR GROWING CARBON NANOTUBE, AND CARBON NANOTUBE DEVICE

摘要

The invention discloses a method for fabricating a carbon nanotube, and the method comprises the following steps: providing a substrate; forming a catalyst layer on the substrate; forming a porous capping layer on the catalyst layer to finish a wafer; forming the carbon nanotube on the wafer. By the porous capping layer, the well-aligned carbon nanotube can grow on the wafer through thermal CVD.