AIR BEARING, NON-CONTACT TYPE CONVEYING DEVICE USING THE SAME

摘要

PURPOSE: An air bearing and a contactless transfer system using the same is provided to reduce processing costs by processing and shape of porous material which are similarly facilitating to woodworking. CONSTITUTION: An air bearing comprises: a porous member(100) wherein a plenty of micro pores is formed in a body and which is formed at a temperature of 80~270°C for 1~24 hours so that the micro pores are created; and a housing(200) wherein the fixed part of the porous member is inserted and fixed and a breather(210) interconnects the porous member and the outside. The diameter of the micro pore is formed into 6 ~ 25μm. The porosity which the precision-machining per unit volume of the porous member occupies is formed in 15 ~ 40%.