| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the inspection accuracy of an inspection object with a simple constitution, and reduce the manufacturing cost. <P>SOLUTION: While arranging a light source 8 at each end surface 5c of a light guide 5, a recess 6 which has almost V-shaped cross section is arranged in such a pattern as to cross the upper surface portion 5a of the light guide 5. Such a function as a half mirror is added to the inner surface portion 6a of the recess 6. <P>COPYRIGHT: (C)2010,JPO&INPIT |
