| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the yield of an electronic component comprising a plurality of medium layers. <P>SOLUTION: A method for manufacturing an electronic component includes: a step of applying dry-etching to a third medium layer 13 to expose a second medium layer 12, when the selection ratio of a third medium layer 13 to a second medium layer 12 in dry-etching by a first gas is larger than the selection ratio of the second medium layer 12 to a first medium layer 11 in dry-etching by a second gas; a step of laser-machining the first medium layer 11 from the side of the second medium layer 12 to modify the first medium layer 11; and a step of laser-machining the second medium layer 12 to modify the second medium layer 12. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
