发明名称 PROBE ASSEMBLY ARRANGEMENT
摘要 <p><P>PROBLEM TO BE SOLVED: To assemble an array of MEMS probes on an application platform of a probe card. <P>SOLUTION: A probe array is assembled on a probe card platform. Each of the probes in the probe array has a probe base that includes a gripping handle. The probe bases have two or more different shapes. The probe bases of different shapes are interleaved such that any two adjacent probes on the platform have probe bases of different shapes. The arrangement of the probes increases effective spacing between the probes to facilitate the maneuvering of a handling tool. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010112950(A) 申请公布日期 2010.05.20
申请号 JP20090253979 申请日期 2009.11.05
申请人 WINMEMS TECHNOLOGIES CO LTD 发明人 HSU TSENG-YANG
分类号 G01R1/073;B81B3/00;H01L21/66 主分类号 G01R1/073
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