发明名称 |
MEASUREMENT APPARATUS, MEASUREMENT METHOD, COMPUTER, PROGRAM, AND EXPOSURE APPARATUS |
摘要 |
A measurement apparatus includes an interferometer, and a computer configured to calculate a phase distribution and an amplitude distribution by Fourier-transforming a first interference signal detected by the photoelectric conversion element of the interferometer, to correct the phase distribution using a correction-use phase difference distribution, to calculate a second interference signal by reverse-Fourier-transforming the phase distribution that has been corrected and the amplitude distribution, and to calculate the position of the target surface based on the second interference signal.
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申请公布号 |
US2010125432(A1) |
申请公布日期 |
2010.05.20 |
申请号 |
US20090620280 |
申请日期 |
2009.11.17 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SASAKI RYO |
分类号 |
G01B11/14;G01B9/02;G06F15/00 |
主分类号 |
G01B11/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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