REAGENT DISPENSING APPARATUSES AND DELIVERY METHODS
摘要
<p>This invention relates to a vapor or liquid phase reagent dispensing apparatus that may be used for dispensing vapor or liquid phase reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices. The vapor phase reagent dispensing apparatus has a single port capable of receiving a carrier gas and dispensing a vapor phase reagent. The liquid phase reagent dispensing apparatus has a single port capable of receiving an inert gas and dispensing a liquid phase reagent.</p>
申请公布号
WO2010056576(A1)
申请公布日期
2010.05.20
申请号
WO2009US63201
申请日期
2009.11.04
申请人
PRAXAIR TECHNOLOGY, INC.;SARIGIANNIS, DEMETRIUS;AHMED, MUSHTAQ, M.