| 摘要 |
A stage for a substrate temperature control apparatus is provided, and with such stage, expansion of transient temperature distribution generated while heating or cooling the substrate is reduced compared with conventional stages. The stage for a substrate temperature control apparatus is to be used for placing a substrate, which has a prescribed diameter, at a prescribed position on the substrate temperature control apparatus which controls the temperature of the substrate. The stage includes a plate whereupon a step section lower than the center section is formed in a region including a position which corresponds to the edge of the substrate on a first surface facing the substrate, and a temperature control section arranged on a second surface on the side opposite to a first surface of the plate.
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