| 摘要 |
PROBLEM TO BE SOLVED: To provide a silica container which ensures cost reduction, high dimensional precision and high durability, and a method of manufacturing the same. SOLUTION: The method of manufacturing the silica container includes a step of: (1) preparing first raw material powder which is a silica particle, spherical second raw material powder comprising amorphous silica and having small average particle diameter, third raw material powder comprising silica as a main component and containing Al element and/or OH or a crystal seed material and forth raw material powder comprising high purity crystalline silica; and (2) forming the second raw material powder into granule bodies; a step of: (3) mixing the granular bodies of the first raw material powder and the second raw material powder; and (4) introducing the mixed powder into the inner wall of an outer mold form to form into a prescribed shape; a step of: (5) pressing the mixed powder to form a base body; (6) firing the base body and eliminating distortion; (7) forming an intermediate layer on the inner surface of the base body by spreading, supplying and melting the third raw material powder from the inside of the base body; and (8) forming an inner side layer on the inner surface of the intermediate layer by spreading, supplying and melting the forth raw material powder from the inside of the base body on which the intermediate layer is formed, wherein (6), (7) and (8) are carried out in random order. COPYRIGHT: (C)2010,JPO&INPIT
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