INSPECTION METHOD BASED ON CAPTURED IMAGE AND INSPECTION DEVICE

摘要

[PROBLEMS]To provide an inspection method and an inspection device which can accurately inspect a state of a film and a defective portion on a surface of an object-to-be-inspected according to a captured image.[MEANS FOR SOLVING PROBLEMS]An inspection method and an inspection device apply a white light Lfrom an illumination unit to a surface of an object-to-be-inspected (10) so as to capture an image of the surface of the object-to-be-inspected (10) by an imaging unit (100). According to the captured image, the state of the surface of the object-to-be-inspected (10) is inspected. By changing the deflection state of the incident light Lcoming into the imaging unit (100) from the illuminated portion of the object-to-be-inspected (10), a plurality of captured images are obtained according to the light LR in differently deflected states when coming into the imaging unit (100).