发明名称
摘要 <p>The present invention contemplates a variety of methods and techniques for fabricating an improved carbon nanotube (CNT) device such as an AFM probe. A CNT is first formed on a desired location such as a substrate. The CNT and substrate are then covered with a protective layer through a CVD or other suitable process. Then a length of the CNT is exposed through etching or other suitable process, the exposed length being formed to a length suitable for a desired application for the CNT device.</p>
申请公布号 JP2010516620(A) 申请公布日期 2010.05.20
申请号 JP20090548380 申请日期 2008.01.28
申请人 发明人
分类号 C01B31/02;C23C16/42;G02B21/06 主分类号 C01B31/02
代理机构 代理人
主权项
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