发明名称 WIRE SAW MACHINE
摘要 PROBLEM TO BE SOLVED: To provide a wire saw machine performing high-accuracy cutting. SOLUTION: The wire saw machine 2 includes a frame 4, a pair of main rollers 6, 8, and a wire 12. Each of the main rollers 6, 8 is supported by the frame 4. The main rollers 6, 8 are rotatable around rotational axes 14, 28 as a rotational center, and have outer peripheral surfaces and a plurality of grooves whose rotational centers being the rotational axes 14, 28. The respective grooves are formed across the whole periphery of the outer peripheral surfaces extending along the circumferential direction. The wire 12 is wound in turn from a groove on one end side of the pair of the main rollers 6, 8 toward a groove at the other end side thereof. The length of one circumferential length of the wire 12 wound around the pair of the main rollers 6, 8 is constituted to be gradually changed from the groove on the one end side toward that on the other end side. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010110865(A) 申请公布日期 2010.05.20
申请号 JP20080286019 申请日期 2008.11.07
申请人 KANAI HIROAKI 发明人 KONISHI TOMOYUKI
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
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