| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a metal mold member, which has a less minute undulation Wa and regulates generation of defects in a micropattern. Ž<P>SOLUTION: On a surface of a glass substrate 1 having a shape of a plate, a Si layer 3 is formed. Both surfaces (the surface 3A and surface 1A) of the substrate on which the Si layer 3 is formed are simultaneously polished. After polishing, a micro concave and convex pattern 4 for a discrete track medium or micro concave and convex pattern 4 for a bit patterned medium is formed on the surface of the Si layer 3. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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