| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and method of remotely, precisely, and efficiently measuring the shape of the entire plane to be measured of an object under high radiation by a noncontact system. Ž<P>SOLUTION: The apparatus includes: a first ultrasonic distance sensor detecting the distance to the plane to be measured; an XY table holding the first ultrasonic distance sensor movably in an XY plane that is the reference surface; and a position detection device detecting the position of XY coordinates of the first ultrasonic distance sensor in the XY plane. The apparatus further includes a second ultrasonic distance sensor for grasping the positional relationship between a calibration testpiece for calibrating the measurement value of the first ultrasonic distance sensor and the object. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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