发明名称 |
MULTI-AXIS CAPACITIVE ACCELEROMETER |
摘要 |
A multi-axis accelerometer is consisted of a substrate with sensing electrodes and a structure layer. The structure layer includes anchor bases fixed on the substrate. A first proof mass is disposed over the substrate and has a first opening and a second opening symmetric to each other. The first proof mass is suspended to the anchor bases. Fixed sensing blocks are disposed on the substrate, and capacitors are formed between each fixed sensing block and the first proof mass for sensing acceleration along two in-plane directions. A second proof mass and a third proof mass are disposed in the first opening and the second opening and are asymmetrically suspended. Separate electrodes are disposed on the substrate and form two differential capacitors with the second proof mass and the third proof mass for sensing the out-of-plane acceleration.
|
申请公布号 |
US2010122579(A1) |
申请公布日期 |
2010.05.20 |
申请号 |
US20090618791 |
申请日期 |
2009.11.16 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
HSU YU-WEN;CHEN SHEAH;CHIEN HSIN-TANG |
分类号 |
G01P15/125 |
主分类号 |
G01P15/125 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|