LITHOGRAPHY SYSTEM AND LITHOGRAPHY METHOD

摘要

PURPOSE: A lithography system and a lithography method are provided to obtain a microstructure with a high resolution by transferring modulated light along the flow of a photo-curable fluid. CONSTITUTION: A photo-curable fluid flows through a microfluidic channel(110). A light projection unit supplies light which is transferred along the flow of the photo-curable fluid to the microfluidic channel. The light projection unit includes light source(160) and a spatial light modulator(150). The spatial light modulator modulates light from the light source. The speed of the light is the same as the speed of the photo-curable fluid.