| 摘要 |
PROBLEM TO BE SOLVED: To provide a micropump which prevents liquid leakage when an operation thereof is stopped and stably feeds liquid. SOLUTION: A micropump 1 includes: a pump chamber 110; a suction port 311 which sucks liquid from the outside to the pump chamber 110; a vibrating plate 130; a piezoelectric element 120; a suction-side check valve 500 which has a magnetic force acting part 530 and is disposed for making the intake port 311 openable or closable; a suction-side valve seat 310; and an electromagnet 610 having an iron core 611. When the piezoelectric element 120 vibrates the vibrating plate 130, the electromagnet 610 operates to separate the suction-side check valve 500 from the suction-side valve seat 310 by a magnetic force acting on the magnetic force acting part 530. When the piezoelectric element 120 does not vibrate the plate 130, the electromagnet 610 operates to attract the suction-side check valve 500 to intake side valve seat 310 so that the suction-side check valve 500 closes the suction port 311 and is fixed thereon by the magnetic force acting on the magnetic force acting part 530. COPYRIGHT: (C)2010,JPO&INPIT
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