| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical deflector array in which a large area of driving electrodes is given for tilting movable parts around axes perpendicularly intersecting with the raw of the array, and driving efficiency is improved. Ž<P>SOLUTION: The optical deflector array includes: a supporting member; movable parts; reflection faces provided on at least one face of the movable parts; movable part counter electrodes provided on the faces opposite to the reflection faces of the movable parts; at least a pair of elastic members which are connected to the supporting member and the movable parts and tiltably support the movable parts around an axis which perpendicularly intersects at least with the array direction; first driving electrodes which tilt the movable parts around an axis which perpendicularly intersects with the array direction; and a first voltage control means which individually controls the voltages applied on the respective first driving electrodes, wherein the first driving electrodes are formed between the adjacent axes and stranding the adjacent movable parts, the first voltage control means, when tilting the movable parts, applies predetermined voltage difference between the adjacent first driving electrodes. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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