SUBSTRATE POSITION DETECTION APPARATUS, SUBSTRATE POSITION DETECTION METHOD, FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND A COMPUTER READABLE STORAGE MEDIUM

摘要

A disclosed substrate position detection apparatus includes an imaging portion configured to take an image of a substrate subject to a position detection; a panel member provided between the imaging portion and the substrate and including a first opening that ensures a field of view for the imaging portion with respect to the substrate, the panel member having a light scattering property; a first illuminating portion configured to illuminate the panel member; and a processing portion capable of determining a position of the substrate in accordance with the image taken through the first opening by the imaging portion.