METHOD FOR FORMATION OF NANOHOLES USING CARBOTHERMAL REDUCTION

摘要

PURPOSE: A nano-hole formation method with a carbonthermal reduction reaction is provided to form a nano-hole in an insulating layer by carbonthermal reducing the insulating layer on which metallic particles are deposited. CONSTITUTION: An insulating layer is formed on the upper side of a substrate. Metals or transition metal particles are deposited on the upper side of the insulating layer. A carbon layer which contacts with the metal particles is formed. A nano-hole is formed through the carbonthermal reduction of the insulating layer. The substrate is selected from a group that includes silicon wafers, sapphires, glasses, quartzes, metals, alumina and plastics.