| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mask storage container capable of storing a pattern transfer mask while keeping the inner cleanliness to an extremely low value. <P>SOLUTION: The mask storage container 100 for storing a reticle 107 includes an outer dish 101 and an outer lid 103 to be joined with the outer dish 101 so as to form an inner sealed space 100a, wherein the mask storage container 100 includes: an inner lid 104 and an inner dish 102 forming a mask space 100b for storing the reticle 107 inside the sealed space 100a, when the outer lid 103 and the outer dish 101 are joined; and an encapsulation port 111 with a check valve for introducing a gas having a lower cleanliness than a predetermined cleanliness into the mask space 100b when the outer lid 103 is disengaged from the outer dish 101 of the mask storage container 100 storing the reticle 107. By this configuration, the reticle 107 can be stored while keeping the inner cleanliness to an extremely low value. <P>COPYRIGHT: (C)2010,JPO&INPIT |
