发明名称 SCANNING TRANSMISSION ELECTRON MICROSCOPE USING GAS AMPLIFICATION
摘要 PROBLEM TO BE SOLVED: To provide a scanning transmission electron microscope operated with a sample in a high pressure environment. SOLUTION: A preferred detector uses gas amplification by converting either scattered or unscattered transmitted electrons to secondary electrons for efficient gas amplification. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010114081(A) 申请公布日期 2010.05.20
申请号 JP20090251999 申请日期 2009.11.02
申请人 FEI CO 发明人 WILLIAM RALPH KNOWLES;TOTH MILOS
分类号 H01J37/244;H01J37/28 主分类号 H01J37/244
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