APPARATUS OF PROCESSING SUBSTRATE

摘要

PURPOSE: A substrate processing device is provided to reduce a manufacturing cost and consumed time by reusing collected fluids for processing a substrate. CONSTITUTION: A fluid mixing unit(100) mixes fluids. A fluid supply unit(400) provides fluids to the fluid mixing unit. A processing unit(200) receives the fluids from the fluid mixing unit and processes the substrate. A fluid collection unit(300) collects the fluids from the processing unit. A fluid supplementation line(440) is connected to the fluid supply unit and the fluid collection unit. The fluid supplementation line supplies the fluids from the fluid supplying unit to the fluid collection unit.