APPARATUS FOR CONTROLLING FAN FILTER UNITS

摘要

PURPOSE: An apparatus for controlling fan filter units of a substrate processing machine is provided to compensate pressure in a process chamber by controlling the suction fans of the fan filter units. CONSTITUTION: A pressure sensor(150) measures the pressure in a process chamber. Fan filter units include a plurality of fans(210). Air is introduced in the process chamber through the fans in order to form downstream air. A control unit(200) controls the fan filter units. The control unit includes a temperature controller(260). The temperature controller controls each fan using temperature sensors in the fans.