| 摘要 |
PURPOSE: A substrate scribing apparatus is provided to prevent the generation of defects during a scribing process by transferring a scriber or a support unit for a substrate based on correction values which corresponds to each coordinates. CONSTITUTION: A plurality of cells is formed on a substrate(100). A support unit(200) supports the substrate. A scriber(300) forms scribe lines in order to define cells. The coordinates of the substrate and correction values which correspond to the coordinates are set. A control unit(400) transfers the scriber and the support unit based on the correction values.
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