PRESSURE SENSOR, SENSOR PROBE COMPRISING A PRESSURE SENSOR, MEDICAL APPARATUS COMPRISING A SENSOR PROBE AND A METHOD OF FABRICATING A SENSOR PROBE
摘要
A pressure sensor includes a flexible membrane deformable in response to pressure. The flexible membrane covers a cavity and includes a strain gauge that produces signals corresponding to deformation of the flexible membrane. The flexible membrane is a flexible monolithic integrated circuit foil.
申请公布号
EP2185904(A2)
申请公布日期
2010.05.19
申请号
EP20080807360
申请日期
2008.08.19
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.;NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
发明人
DEKKER, RONALD;VAN DER GRAAF, FREDERIK;VELTHUIS, JOHANNES, F., M.;HAARTSEN, JAAP, R.