| 摘要 |
A measurement apparatus includes an illumination light setting unit which sets illumination light having an optical characteristic corresponding to a microstructure which is formed on the surface of a measurement target and is to be measured, a measurement unit which measures reflected light when the measurement target is irradiated with the illumination light, and an extraction unit which extracts, from the measured reflected light, information about the surface shape of the measurement target and the microstructure formed on the surface.
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