Apparatus for continuous coating of a strip substrate,申请号EP20070006980-传众专利搜索

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发明名称	Apparatus for continuous coating of a strip substrate
摘要
申请公布号	EP1978126(B1)	申请公布日期	2010.05.19
申请号	EP20070006980	申请日期	2007.04.03
申请人	APPLIED MATERIALS, INC.	发明人	MULTRUS, ERWIN
分类号	C23C14/04;C23C14/56	主分类号	C23C14/04
代理机构		代理人
主权项
地址

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