| 摘要 |
PURPOSE: A unit for collecting liquid and an apparatus for processing a substrate including the same are provided to improve exhaust efficiency by introducing a processing chemical and an air current into one collection container. CONSTITUTION: A plurality of collection containers in a ring shape has an identical center. An elevation unit(300) elevates the collection containers. The elevation unit includes a first elevation plate(320), a second elevation plate(340), a third elevation plate(360) and a driving plate(370) and a driving unit(380). The first elevation plate surrounds an inner collection container(220). A second elevation plate surrounds a middle collection container(240). A third elevation plate surrounds the external collection container. The driving unit rotates the driving plate.
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