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发明名称
Displacement correction of a sample stage for an eucentric rotation in a charged particle microscope
摘要
申请公布号
EP2056332(B1)
申请公布日期
2010.05.19
申请号
EP20080018848
申请日期
2008.10.28
申请人
HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人
TSUNETA, RURIKO;KIKUCHI, HIDEKI;YOTSUJI, TAKAFUMI;YAGUCHI, TOSHIE
分类号
H01J37/20
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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