发明名称 Small ultra-high NA catadioptric objective using a Mangin mirror
摘要 The invention relates to an objective for imaging a specimen comprising a lens group (401,501) comprising a focusing lens forming an intermediate image; a catadioptric arrangement (403,503) having an aspheric surface and comprising a mirror (409,509) and one Mangin mirror (411,511), imaging said intermediate image in a final image. The catadioptric arrangement (403,503) additionally comprises one lens (410,510) placed between the mirror (409,509) and the Mangin mirror (411,511).
申请公布号 EP2187251(A2) 申请公布日期 2010.05.19
申请号 EP20100000348 申请日期 2006.03.13
申请人 KLA-TENCOR TECHNOLOGIES CORPORATION 发明人 SHAFER, DAVID;ARMSTRONG, JOSEPH J.;CHUANG, YUNG-HO
分类号 G02B21/04;G02B17/00;G02B17/08 主分类号 G02B21/04
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