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发明名称
METHOD FOR PRODUCTION OF SIMOX SUBSTRATE
摘要
申请公布号
EP1264339(B1)
申请公布日期
2010.05.19
申请号
EP20010908249
申请日期
2001.03.02
申请人
NIPPON STEEL CORPORATION
发明人
KAWAMURA, KEISUKE;MATSUMURA, ATSUKI;MIZUTANI, TOSHIYUKI
分类号
H01L21/265;H01L21/762;H01L21/324
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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