PROXIMITY EXPOSURE APPARATUS, METHOD OF DELIVERING A MASK OF A PROXIMITY EXPOSURE APPARATUS AND METHOD OF MANUFACTURING A DISPLAY PANEL SUBSTRATE

摘要

PURPOSE: A proximity exposure apparatus, a method for transferring the mask of the same and a method for manufacturing a display panel substrate are provided to improve the quality of the display panel substrate by precisely performing the mask location determining process and a pattern transferring process. CONSTITUTION: A first control unit controls the transfer of a stage. A mask is loaded on a chuck(10) by a mask transfer unit. A plurality of push-up units includes a motor(11) in order to elevate push-up pins. A first image pick-up unit takes an image of a mark on a mask and outputs image signal. A transferring unit transfers the first image pick-up unit. An image process unit processes the image signal and detects the location of the mask.