METHOD FOR MANUFACTURING SPUTTER-COATED SUBSTRATES, MAGNETRON SOURCE AND SPUTTERING CHAMBER WITH SUCH SOURCE,申请号EP20050700302-传众专利搜索

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发明名称	METHOD FOR MANUFACTURING SPUTTER-COATED SUBSTRATES, MAGNETRON SOURCE AND SPUTTERING CHAMBER WITH SUCH SOURCE
摘要
申请公布号	EP1723664(B9)	申请公布日期	2010.05.19
申请号	EP20050700302	申请日期	2005.01.06
申请人	OC OERLIKON BALZERS AG	发明人	KADLEC, STANISLAV;KUEGLER, EDUARD;HAAG, WALTER
分类号	H01J37/34	主分类号	H01J37/34
代理机构		代理人
主权项
地址

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