发明名称 |
A method for forming a multi-level surface on a substrate with areas of different wettability and a semiconductor device having the same. |
摘要 |
The invention relates to a method 10 for forming a multi-level surface on a substrate 2, wherein said surface comprises areas of different wettability, the method comprising the step (A, B) of applying a multi-level stamp to the substrate for forming the multi-level surface, said multi-level stamp having different structural regions 1a arranged along the multi-level surface for locally altering wettability properties of at least a portion of a level of the multi-level surface 2a, 2b. The invention further relates to a semiconductor device and a method for manufacturing a semiconductor device. |
申请公布号 |
EP2187263(A1) |
申请公布日期 |
2010.05.19 |
申请号 |
EP20080169031 |
申请日期 |
2008.11.13 |
申请人 |
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST -NATUURWETENSCHAPPELIJK ONDERZOEK TNO |
发明人 |
PETER, MARIA;MEINDERS, ERWIN RINALDO |
分类号 |
G03F7/00;B29C59/02 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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