发明名称 A method for forming a multi-level surface on a substrate with areas of different wettability and a semiconductor device having the same.
摘要 The invention relates to a method 10 for forming a multi-level surface on a substrate 2, wherein said surface comprises areas of different wettability, the method comprising the step (A, B) of applying a multi-level stamp to the substrate for forming the multi-level surface, said multi-level stamp having different structural regions 1a arranged along the multi-level surface for locally altering wettability properties of at least a portion of a level of the multi-level surface 2a, 2b. The invention further relates to a semiconductor device and a method for manufacturing a semiconductor device.
申请公布号 EP2187263(A1) 申请公布日期 2010.05.19
申请号 EP20080169031 申请日期 2008.11.13
申请人 NEDERLANDSE ORGANISATIE VOOR TOEGEPAST -NATUURWETENSCHAPPELIJK ONDERZOEK TNO 发明人 PETER, MARIA;MEINDERS, ERWIN RINALDO
分类号 G03F7/00;B29C59/02 主分类号 G03F7/00
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