发明名称 |
Hybrid planar lightwave circuit with reflective gratings |
摘要 |
The present invention relates to a hybrid planar lightwave circuit in which a silicon reflective diffraction grating etched with a highly accurate deep reactive ion etching process is mounted in a trench formed in a high optical performance silica on silicon waveguide device.
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申请公布号 |
US7720335(B2) |
申请公布日期 |
2010.05.18 |
申请号 |
US20070865290 |
申请日期 |
2007.10.01 |
申请人 |
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发明人 |
PEARSON MATT;BALAKRISHNAN ASHOK;BIDNYK SERGE |
分类号 |
G02B6/34 |
主分类号 |
G02B6/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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