发明名称 Method for fabricating magnetic write pole for a magnetic head using an E-beam resist mask
摘要 A method is disclosed for independently controlling track width and bevel angle of a write pole tip of a magnetic recording head. The method includes establishing the track width in the pole tip layer material utilizing E-beam lithography. A portion of this pole tip material having the established track width is protected by providing a temporary masking material to make a protected portion. At least one unprotected portion is left exposed to be shaped. This unprotected portion is then beveled to produce at least one beveled portion. The protected portion produces an upper pole tip portion which together with the beveled portion produce an improved pole tip. Also disclosed is a magnetic head having the improved pole tip, and a disk drive having a magnetic head having the improved pole tip.
申请公布号 US7716813(B2) 申请公布日期 2010.05.18
申请号 US20060634667 申请日期 2006.12.05
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. 发明人 LEE KIM Y.;LO JYH-SHUEY
分类号 G11B5/187;B44C1/22 主分类号 G11B5/187
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